Docking station for substrate transport containers
AssigneeBrooks Automation, Inc.
InventorsKlaus Schultz, Alfred Schulz, Marlies Mages
Life of this patent
Estimating the term…
Abstract
A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.
Claims18
A device for bringing together containers at a port positioned in a wall member, said port adapted for the loading and unloading of said containers, said device comprising:
- a horizontally moveable platform adapted to receive said containers and to bring said containers to said port;
- three supports coupled to said platform said three supports adapted to vertically support and align said containers;
- a removable closure member positioned in said port and adapted to contact said containers and be removed from said port when said containers are moved by said platform;
- and
- means for detecting the presence of a container and a protrusion adapted to distinguish between containers having different contents, both said detecting means and said protrusion being positioned proximate said platform.
A substrate loading and unloading station adapted to open a first container comprising:
- a movable platform;
- container alignment pins coupled to the movable platform;
- a container alignment detector adapted to detect alignment of the first container placed on the movable platform;
- a protrusion coupled to the platform adapted to engage a recess in the first container;
- and
- a container presence detector adapted to detect presence of any container on the platform;
- wherein, the container alignment detector is adapted to detect misalignment of a second container placed on the moveable platform, wherein the second container does not have the recess, and wherein, the misalignment occurs by contact of the protrusion with the second container because the second container does not have the recess to receive the protrusion.
A method of determining a type of substrate container on a platform of a substrate loading and unloading station comprising the steps of:
- sensing presence of a container on the substrate loading and unloading station platform by a first detector;
- and
- sensing alignment of the container on the platform by a second detector;
- wherein, the platform comprises a coding feature, and a first type of substrate container has a mating feature, and a second type of substrate container does not have a mating feature;
- wherein, the second detector senses a first alignment sensor reading when the first type of substrate container is located on the platform with the coding feature being mated with the mating feature, and wherein, the second detector senses a different second alignment sensor reading when the second type of substrate container is located on the platform with the coding feature contacting the second type of container.
Dependencies are inferred from the claim text.