MEMS structure with mechanical overdeflection limiter
AssigneeGlimmerglass Networks, Inc.
InventorsBryan P. Staker, James P. Spallas, Lawrence P. Muray, Andres Fernandez
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Abstract
A MEMS device having a fixed element and a movable element wherein one or the other of the fixed element and the movable element has at least one radially-extended stop or overdeflection limiter. A fixed overlayer plate forms an aperture. The aperture is sized to minimize vignetting and may be beveled on the margin. Overdeflection limitation occurs during deflection before the movable element can impinge on an underlying electrode. The overdeflection limiter may be conveniently placed adjacent a gimbaled hinge.
Claims11
A double-gimbaled micromachined mirror structure for parallel-plate electrostatic operation, said mirror structure comprising:
- a frame;
- a mirror;
- a gimbal around said mirror;
- a plurality of hinge structures at four positions on said gimbal, a first pair of said hinge structures connecting said mirror to said gimbal and a second pair of said hinge structures connecting said frame to said gimbal, said hinge structures permitting motion substantially only normal to said mirror and wherein adjacent each element of said first pair is a gimbal wraparound for serving as rotational displacement limitation;
- and
- overhanging structure adjacent each of said four positions and disposed to confront each said gimbal wraparound to limit rotational displacement of said mirror.
Dependencies are inferred from the claim text.