Wedge-shaped high density capacitor and method of making the capacitor

A capacitor structure comprising:

• a plurality of adjacent trenches, each having a wedge-shaped layout, formed in a host trench material;
• and
• for each trench,
• (i) alternating layers of insulating material and conductive material formed in the trench such that each layer of conductive material in the trench is electrically isolated from adjacent layers of conductive material;
• (ii) a first electrical contact formed to electrically link in parallel a first set of alternating layers of conductive material formed in the trench;
• and
• (iii) a second electrical contact formed to electrically ink in parallel a second set of alternating layers of conductive material formed in the trench
• whereby the first and second electrically isolated sets of alternating layers of conductive material define an interdigitated capacitor structure.

A method of forming a capacitor structure, the method comprising:

• forming a trench having a wedge-shaped layout in a host trench material;
• forming alternating layers of insulating material and conductive material formed in the trench such that each layer of conductive material in the trench is electrically isolated from adjacent layers of conductive material;
• forming a first electrical contact formed to electrically link in parallel a first set of alternating layers of conductive material formed in the trench;
• and
• forming a second electrical contact formed to electrically link in parallel a second set of alternating layers of conductive material formed in the trench
• whereby the first and second electrically isolated sets of alternating layers of conductive material define an interdigitated capacitor structure.

A method of forming a capacitor structure, the method comprising:

• forming a plurality of adjacent trenches, each having a wedge-shaped layout, in a host trench material;
• and
• for each trench,
• (i) forming alternating layers of insulating material and conductive material formed in the trench such that each layer of conductive material in the trench is electrically isolated from adjacent layers of conductive material;
• (ii) forming a first electrical contact formed to electrically link in parallel a first set of alternating layers of conductive material formed in the trench;
• and
• (iii) forming a second electrical contact formed to electrically link in parallel a second set of alternating layers of conductive material formed in the trench
• whereby the first and second electrically isolated sets of alternating layers of conductive material define an interdigitated capacitor structure.