Protecting circuit of the semiconductor factory automation
AssigneeMacronix International Co., Ltd.
InventorWen-Yung Lin
Life of this patent
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AssigneeMacronix International Co., Ltd.
InventorWen-Yung Lin
Estimating the term…
First of all, a processing apparatus that is utilized in the semiconductor industry, a protecting circuit and an automatic running apparatus having the standardized mechanical interface (SMIF) are provided. The protecting circuit includes: a voltage-induction device, a logical device and two electric-lighting devices. The protecting circuit receives the signals from the processing apparatus by the voltage-induction device, and the protecting circuit utilizes the logical device to perform a logical calculation in accordance with the signals from the processing apparatus. Furthermore, the states of operating the processing apparatus are shown in two electric-lighting devices, and the logical signals are transported from the protecting circuit into the standardized mechanical interface (SMIF) to control the operation of the robotic arm in the automatic running apparatus.
A protecting circuit adaptable to an automatic transport apparatus having a standardized mechanical interface, said protecting circuit comprising:
A protecting circuit used in a standardized mechanical interface, said protecting circuit comprising:
A protecting circuit used in a standardized mechanical interface, said protecting circuit comprising:
A protecting system of the semiconductor apparatus, said protecting system comprising:
Dependencies are inferred from the claim text.