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US 6,639,317 B2Granted
Semiconductor device in trench
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi Tomita, Soichi Nadahara
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Abstract
In the etching method, ozone water containing an oxidation agent having an oxidation-reduction potential of 2V or more is supplied onto a metal compound film such as SrRuO film or the like, and the metal compound film is etched by oxidation-reduction reaction involving oxygen. The metal compound film, which is conventionally removed by a physical removal method, can be easily removed by wet etching. Manufacture of a capacitor containing an SrRuO film and the like can thus be facilitated.
Claims2
A semiconductor device comprising:
- an insulating layer having a trench;
- a first metal compound layer formed on an inner surface of the trench;
- a second metal compound layer which is formed on the inner surface of the trench with the first metal compound layer inserted therebetween and extends on an upper surface of the insulating layer;
- a third metal compound layer which fills inside of the trench with the first and the second metal compound layer inserted therebetween and extends on the upper surface of the insulating layer with the second metal compound layer inserted therebetween;
- and
- a mask layer formed on the third metal compound layer and covering at least the third metal compound layer,
- wherein an outer edge of the third metal compound layer is formed inside an outer edge of the mask layer, and a distance between the outer edge of the third metal compound layer and the outer edge of the mask layer is set to be 0.3 μm or less.
4 more elements
A semiconductor device comprising:
- an insulating layer having a trench;
- a first metal compound layer formed on an inner surface of the trench;
- a second metal compound layer which is formed on the inner surface of the trench with the first metal compound layer inserted therebetween and which extends on an upper surface of the insulating layer;
- a strontium-ruthenium compound layer which fills inside of the trench with the first and the second metal compound layer inserted therebetween and which extends on the upper surface of the insulating layer with the second metal compound layer inserted therebetween;
- and
- a mask layer formed on the strontium-ruthenium compound layer and covering at least the strontium-ruthenium compound layer.
3 more elements
Dependencies are inferred from the claim text.