Fuse structure
AssigneeNanya Technology Corporation
InventorWu-Der Yang
Life of this patent
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AssigneeNanya Technology Corporation
InventorWu-Der Yang
Estimating the term…
A novel fuse structure. An optimal position of laser spol is defined above a substrate. A first conductive layer is formed on part of the substrate. A first dielectric layer is formed on the substrate and the first conductive layer. A second conductive layer is formed on the first dielectric layer. A second dielectric layer id formed on the first dielectric layer and the second conductive layer. A third conductive layer comprising the position of laser spot is formed on part of the second dielectric layer. A plurality of first conductive plugs penetrate the first dielectric layer, to electrically connect the first conductive layer and the second conductive layer. At least one second conductive plug penetrate the second dielectric layer, to electrically connect the second conductive layer and the third conductive layer. Thus, the first conductive layer serves as a backup conductive layer when the second conductive layer is broken.
A fuse structure, comprising:
A fuse window having a plurality of fuse structures, each of the fuse structures comprising:
Dependencies are inferred from the claim text.