Ceramic heater
AssigneeIbiden Co., Ltd.
InventorYasutaka Ito
Life of this patent
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Abstract
A ceramic heater capable of reducing temperature uniformity at the periphery of through holes such as insertion holes and vacuum suction holes is provided, which protects wafer against thermal shocks and has improved controllability for temperature control parts such as thermocouples and temperature fuse. Further, a ceramic heater capable of uniform resin curing is provided. A heat generation body is disposed on the surface or inside of a ceramic substrate. Further, corners for the insertion holes, the recesses and the vacuum suction holes of the ceramic substrate are chamfered.
Claims9
A ceramic heater having temperature control means on a surface or inside of a ceramic substrate, wherein said ceramic substrate has a recess for containing a temperature measuring element formed on a side opposite to a heating surface, a corner defined by a bottom face and a wall face of the recess is chamfered into a first shape having an R surface, and the R surface has a radius of curvature of 15 to 1000 μm.
Dependencies are inferred from the claim text.