Plasma fluorine resistant alumina ceramic material and method of making
AssigneeApplied Materials, Inc.
InventorsAnand Gupta, Tirunelveli S. Ravi
Life of this patent
Estimating the term…
Abstract
A plasma fluorine resistant polycrystalline alumina ceramic material is produced by forming a green body including alumina and a binder, and sintering the green body for a time from about 8 to 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine.
Claims6
A plasma fluorine resistant polycrystalline alumina ceramic body having less than 0.1 surface area % of unsintered particles and having a mean sintered particle size ranging from about 3 μm to about 10 μm produced by the following method:
- (i) forming a green body comprising alumina and a binder;
- and
- (ii) sintering said green body at a temperature ranging from about 1400° C. to about 1700° C. for a time period ranging from about 8 hours to about 12 hours.
A plasma fluorine resistant polycrystalline alumina ceramic body having less than 0.1 surface area % of unsintered particles and having a mean sintered particle size ranging from about 3 μm to about 10 μm produced by the following method:
- (i) forming a green body comprising about 99.3 wt % to about 99.7 wt % of alumina and about 0.7 wt % to about 0.3 wt % of a binder selected from the group consisting of silica, calcium oxide, magnesium oxide and mixtures thereof;
- and
- (ii) sintering said green body at a temperature ranging from about 1400° C. to about 1700° C. for a time period ranging from about 8 hours to about 12 hours.
A plasma fluorine resistant polycrystalline alumina ceramic body comprising about 99.3 wt % to about 99.7 wt % of alumina and about 0.7 wt % to about 0.3 wt % of a binder selected from the group consisting of silica, calcium oxide, magnesium oxide and mixtures thereof, wherein said polycrystalline ceramic body has a mean sintered particle size ranging from about 3 μm to about 10 μm . and wherein the surface area % of unsintered particles in said polycrystalline alumina ceramic body does not exceed 0.1 surface area %.
A plasma fluorine resistant polycrystalline alumina ceramic body having less than 0.1 surface area % of unsintered particles and having a mean sintered particle size ranging from about 3 μm to about 10 μm produced by the following method:
- (i) providing a starting composition comprising alumina and a binder;
- (ii) comminuting said starting composition to produce an intermediate composition having a mean particle size of about 0.2 μm;
- (iii) forming a green body comprising said intermediate composition;
- and
- (iv) sintering said green body at a temperature ranging from about 1400° C. to about 1700° C. for a time period ranging from about 8 hours to about 12 hours.
Dependencies are inferred from the claim text.