Multi-pitch vernier for checking alignment accuracy
AssigneeUnited Microelectronics Corp.
InventorsChih-Hsing Hsin, Wen-Bin Shieh
Life of this patent
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Abstract
A vernier having multi-pitch for checking alignment accuracy. The vernier has the same pitch as the line width of the IC pattern where the diffraction angle of the vernier is the same as that of the IC pattern. The pitch comprises slits which cannot produce image on the wafer, such that a simultaneous pattern with the conventional pattern on the wafer is formed. Accordingly, the alignment accuracy can be accurately checked, thereby monitoring the alignment of IC patterns.
Claims7
A vernier with multi-pitch for checking alignment accuracy of a plurality of IC patterns fabricated by photolithography steps in semiconductor integrated circuits, the vernier comprising:
- a plurality of pre-determined pattern elements having a constant pitch, the pitch equals to a line width of each IC pattern and comprises a bright line and a dark line wherein the width of the bright line is sufficiently narrow that the bright line does not produce an image on a wafer.
A method of checking the alignment accuracy of a mask pattern for a photolithography steps in fabricating semiconductor integrated circuits with a plurality of IC patterns where the IC patterns at least comprises a first and a second IC pattern;
- the method comprising:
- providing a peripheral check alignment pattern having multi-pitch to form a first pre-determined pattern of the peripheral check alignment pattern on the first IC pattern, wherein the peripheral check alignment pattern comprises a plurality of elements, which are arranged in a pre-determined pattern with a first constant pitch, and the first pitch equals to a line width of the first pre-determined pattern and the first constant pitch comprises a bright line and a dark line where a width of the bright line is sufficiently narrow that the bright line does not produce an image on the wafer;
- providing a central check alignment pattern having multi-pitch to form a second pre-determined pattern of the central check alignment pattern on the second IC pattern, wherein the central check alignment pattern comprises a plurality of elements, which are arranged in a pre-determined pattern with a second constant pitch, and the second pitch equals to a design rule of the second pre-determined pattern, and the second pitch equals to a line width of the second pre-determined pattern and the second constant pitch comprises a bright line and a dark line where a width of the bright line is sufficiently narrow that the bright line does not produce an image on the wafer;
- and
- measuring a distance between the first and the second pre-determined patterns to check the alignment accuracy.
Dependencies are inferred from the claim text.