Method for fabricating 3-D structures with smoothly-varying topographic features in photo-sensitized epoxy resists
OwnerMartin A. Afromowitzinventor
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Abstract
A method utilizing gray-tone exposure of a class of thick negative photo-sensitized epoxy resists from the substrate side of a transparent substrate and development methods that rely upon a physical distinction between polymerized (solid) and unpolymerized (liquid) photoresist at elevated temperatures may be used to fabricate 3-D structures in the photo-sensitized epoxy. Such structures may exhibit smoothly-varying topographic features with thicknesses as great as 2 mm.
Claims19
A method for forming a three-dimensional structure in a photo-sensitized epoxy layer residing upon a substrate, the substrate having a first side and a second side, the method comprising the steps of:
- applying a layer of photo-sensitized epoxy to the first side of the substrate;
- exposing at least one region within the layer of photo-sensitized epoxy with a dose of light incident upon the second side of the substrate in a controlled manner to produce polymerization of the selected region, the region being of varying thickness, such that upon removal of non-polymerized regions of the layer, following polymerization of the said region, the resulting three-dimensional structure of polymerized epoxy has a varying topography and varying thickness.
A method for developing a selectively polymerized photo-sensitized layer that resides upon a substrate, comprising the steps of:
- heating the layer to a temperature at which polymerized portions of the layer exhibit properties corresponding to a solid, and unpolymerized portions of the layer exhibit properties corresponding to a liquid, without the use of a solvent;
- and
- spinning the substrate to remove unpolymerized portions of the layer.
A method for developing a selectively polymerized photo-sensitized layer that resides upon a substrate, comprising the steps of:
- heating the layer to a temperature at which polymerized portions of the layer exhibit properties corresponding to a solid, and unpolymerized portions of the layer exhibit properties corresponding to a liquid;
- and
- removing unpolymerized portions of the layer by blowing heated gas at the unpolymerized portions.
Dependencies are inferred from the claim text.