Electro ceramic MEMS structure with controlled actuator gap
AssigneeGlimmerglass Networks, Inc.
InventorsBryan P. Staker, Douglas L. Teeter, Jr., David T. Amm
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Abstract
In an array apparatus, each MEMS element, comprising an actuatable element and a supportive handle, is mounted over a plurality of electrodes wherein the air gap is controlled by the thickness of the electrodes and not primarily by the structure of the handle. The structure of electrostatic actuation electrodes in specific embodiments is disclosed. While the invention is primarily a technique for reducing the air gap without unduly limiting the thickness of the handle, the invention may also be used to establish an air gap greater than the thickness of the handle.
Claims8
A microelectromechanical systems (MEMS) element comprising:
- a handle structure having a predetermined thickness;
- an actuatable element disposed at a cavity in said handle structure;
- a substrate mounted to said handle structure;
- and
- electrodes disposed on said substrate and aligned with said actuatable element, said electrodes being fabricated with a height calibrated to establish a gap with said actuatable element.
Dependencies are inferred from the claim text.