US 6,635,113 B2Granted

Coating apparatus and coating method

AssigneeTokyo Electron Limited

InventorsHideyuki Takamori, Noriyuki Anai, Masafumi Nomura, Kiyohisa Tateyama, Tsutae Omori

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Abstract

A substrate is held on a spin chuck, and resist solution is supplied to the surface of the substrate at a plurality of positions spaced at predetermined intervals from a plurality of resist nozzles provided the bottom surface of a resist pipe provided over a first direction across the surface of the substrate. Thereafter, the substrate is oscillated or rotated, thereby making the resist solution on the substrate a thin coating film with a uniform thickness. In the coating apparatus and method, which are excellent in responsiveness to a degree of viscosity of coating solution, various kinds of treatment agents with a wide range of viscosity can be used, and mechanical accuracy such as the space between the nozzles and the substrate, accuracy of the nozzle size, and the like can be loosened.

Claims6

Dependent claims

A coating apparatus, comprising:

a holding member for holding a substrate to be treated;
a plurality of treatment agent nozzles facing the surface of said substrate to be treated, and provided at predetermined intervals over a first direction across the surface of said substrate to be treated;
a treatment agent supplying system for supplying treatment agent to said treatment agent nozzles;
a guide provided in a second direction different from the first direction, and movably supporting said holding member or said treatment agent nozzles;
a moving system for moving said holding member and said treatment agent nozzles relatively to one another;
an actuator provided at said holding member;
a container for housing said holding member and said actuator;
a lid for tightly covering said container;
a control section for synchronously driving said treatment agent supplying system, said moving system, and said actuator;
a standby position provided adjacently to said holding member;
a pressure sensor provided on the surface opposing said treatment agent nozzles in said standby position, and detecting the discharge pressure of each treatment agent nozzle;
and
a monitoring device for monitoring the operational condition of each of said treatment agent nozzles based on the detected pressure.

10 more elements

Dependencies are inferred from the claim text.