End effector assembly
AssigneeApplied Materials, Inc.
InventorAkihiro Hosokawa
Life of this patent
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Abstract
Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for a substrate transfer robot includes an end effector having a plurality of metallic pads disposed thereon. A polymer pad is disposed on each metallic pad wherein a ratio of an exposed portion of an upper surface of the metallic pad to a top surface of the polymer pad is at least about 3.5 to 1. In another embodiment, an end effector assembly for a substrate transfer robot includes an end effector having a plurality of polymer pads disposed thereon. Each polymer pad includes a fluoropolymer coating disposed on at least a top surface of the polymer pad. The metallic pad and/or the coating allows the polymer pad to be at least temporarily utilized in applications above its normal operating temperature.
Claims50
An end effector assembly for a substrate transfer robot, comprising:
- an end effector;
- a plurality of metallic pads having an upper surface and a lower surface, the lower surface disposed on a first side of the end effector;
- and
- a polymer pad disposed on each metallic pad, the polymer pad having a top surface and a bottom surface, wherein a ratio of an exposed portion of the upper surface of the metallic pad to the top surface of the polymer pad is at least about 3.5 to 1.
An end effector assembly for a substrate transfer robot, comprising:
- an end effector;
- and
- a plurality of polymer pads disposed on the end effector, the polymer pad having a top surface adapted to support a substrate and a bottom surface;
- and
- a fluoropolymer coating disposed on at least the top surface of the polymer pad.
An end effector assembly for a substrate transfer robot, comprising:
- an end effector;
- a plurality of metallic pads having an upper surface and a lower surface, the lower surface disposed on a first side of the end, effector;
- a polymer pad disposed on each metallic pad, the polymer pad having a top surface and a bottom surface, wherein a ratio of an exposed portion of the upper surface of the metallic pad to the top surface of the polymer pad is at least about 3.5:1;
- and
- a fluoropolymer coating disposed on at least the top surface of the polymer pad.
Dependencies are inferred from the claim text.