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US 6,634,245 B1Granted
Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism
AssigneeTokyo Electron Limited
InventorsHaruhiko Yoshioka, Shinji Iino, Yutaka Akaike, Masaru Suzuki
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Abstract
A rotating mechanism 18 according to the present invention is a mechanism for reversibly rotating a chuck top 11, on which a wafer to be inspected is mounted. The rotating mechanism is provided with a linearly driving mechanism 181 arranged on one side of the chuck top 11, a nut 182 which is linearly moved by the linearly driving mechanism, a guide rail 183A for linearly guiding the nut 182, and a link mechanism 184 for coupling the nut 182, which moves along the guide rail 183A, to the chuck top 11.
Claims13
A mount mechanism for mounting an object to be inspected, comprising:
- a chuck top on which the object is mounted;
- a support table for supporting the chuck top to be rotatable in normal and reverse directions, said support table being provided with a vacuum suction mechanism having a vacuum exhaust passage which sucks and fixes the chuck top on the support table by a vacuum force;
- a rotating mechanism for rotating the chuck top on the support table in normal and reverse directions;
- and
- wherein the support table is provided with a lift guide mechanism that has a gas supply/exhaust passage, said gas supply/exhaust passage being for enabling the chuck top to float away from the support table by utilization of a gas pressure, and for enabling the chuck top to land on the support table by releasing the gas pressure.
2 more elements
Dependencies are inferred from the claim text.