Apparatus and method for determining various processes of wafer fabrication in a semiconductor device manufacturing technology

Abstract

According to the present invention, an apparatus for determining various processes of wafer fabrication suitable for a plurality of various processes of wafer fabrication, having: a plurality of wafer cassettes, each having a distinct transparency, used in the various processes of wafer fabrication; a sensor-set, used to detect the distinct transparency of each of the wafer cassettes, and output a signal corresponding to the distinct transparency; and an amplifier, connected to the sensor-set to receive the signal, thus reading the distinct transparency, so as to determine the type of the wafer cassettes. Furthermore, a method for determining various processes of wafer fabrication includes the steps of: providing a plurality of wafer cassettes, each having a distinct transparency, used in the various processes of wafer fabrication; reading the distinct transparency of each of the wafer cassettes; and determining the type of the wafer cassettes according to the distinct transparency.

Dependencies are inferred from the claim text.