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US 6,632,283 B1Granted
System and method for illuminating a semiconductor processing system
AssigneeAdvanced Micro Devices, Inc.
InventorsBhanwar Singh, Bharath Rangarajan, Khoi A. Phan, Bryan K. Choo, Ramkumar Subramanian
Life of this patent
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Abstract
The present invention relates to illuminating an interior portion of a processing chamber in a semiconductor processing system. A light emitting diode is located in the chamber to illuminate the interior of the chamber to facilitate viewing the interior of the chamber.
Claims6
A system for illuminating a semiconductor processing system, comprising:
- a processing chamber of the processing system having an interior;
- a light emitting diode associated with the chamber for illuminating the interior of the chamber;
- a sensor associated with the processing chamber, and operable to sense an operating condition of the processing system and to provide a sensor signal indicative of the sensed operating condition;
- and
- a controller connected to the light emitting diode via a communications link and directly coupled with the sensor to receive the sensor signal directly from the sensor, wherein the controller is operable to directly control activation of the light emitting diode via the communications link based on the sensor signal from the sensor.
2 more elements
A system for illuminating a semiconductor processing system, comprising:
- a processing chamber of the processing system having an interior;
- a light emitting diode associated with the chamber for illuminating the interior of the chamber;
- a sensor associated with the processing chamber, and operable to sense an operating condition of the processing system and communicate an indication of the sensed operating condition;
- and
- a controller adapted to selectively control activation of the light emitting diode based on the indication from the sensor;
- wherein the processing chamber further comprises a wafer chuck having a pedestal associated therewith upon which a wafer resides and a rotatable support member operable to support and rotate the wafer chuck within the processing chamber,
- wherein the light emitting diode is associated with a bottom portion of the processing chamber, and configured to illuminate a bottom portion of the chuck or the rotatable support member in the bottom portion of the processing chamber for visual inspection of the bottom portion of the chuck or the rotatable support member by a technician,
- wherein the sensor associated with the processing chamber is further operable to sense an operating condition of the bottom portion of the chuck or the rotatable support member, and
- wherein the controller is further adapted to selectively control activation of the light emitting diode based on the indication from the sensor.
6 more elements
Dependencies are inferred from the claim text.