Sample processing system
AssigneeCanon Kabushiki Kaisha
InventorsKazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi
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Abstract
This invention is to provide a processing system suitable for manufacturing, e.g., an SOI substrate. A processing system includes a turntable on which holding mechanisms for holding bonded substrate stacks are mounted at a substantially equal angular interval, a driving mechanism for pivoting the turntable through a predetermined angle to move the bonded substrate stacks or separated substrates held by said holding mechanisms to operation positions and a centering apparatus, separating apparatus, and cleaning/drying apparatus for processing the bonded substrate stacks or separated substrates at the operation positions.
Claims32
A processing system for processing a sample, comprising:
- a turntable on which holding mechanisms for holding samples are mounted at a substantially equal angular interval, wherein said holding mechanisms hold the samples by sandwiching the samples from upper and lower sides, each of said holding mechanisms comprising a shift prevention member;
- a driving mechanism for pivoting said turntable through a predetermined angle to move the samples held by said holding mechanisms to operation positions;
- and
- at least one processing apparatus for processing the sample held by said holding mechanism at a predetermined operation position.
Dependencies are inferred from the claim text.