Carbon nanotube device, manufacturing method of carbon nanotube device, and electron emitting device
AssigneeCanon Kabushiki Kaisha
InventorsTohru Den, Tatsuya Iwasaki
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Abstract
The present invention discloses a carbon nanotube device comprising a support having a conductive surface and a carbon nanotube, one of whose terminus binds to the conductive surface so that conduction between the surface and the carbon nanotube is maintained, wherein a root of the carbon nanotube where the carbon nanotube binds to the conductive surface is surrounded by a wall. Such a carbon nanotube device, having carbon nanotubes with a uniform direction of growth, can generate a large quantity of emitted electrons when it is used as an electron emission device.
Claims78
A carbon nanotube device comprising a support having a conductive surface and a carbon nanotube, one of whose terminus binds to said conductive surface at a site so that conduction between said conductive surface and said carbon nanotube is maintained, wherein a root of said carbon nanotube at the site where said carbon nanotube binds to said conductive surface is surrounded by a wall;
- and wherein said carbon nanotube has grown on the surface of a catalytic particle, and said catalytic particle binds to said conductive surface so that conduction therebetween is maintained.
A manufacturing method of a carbon nanotube device comprising a support having a conductive surface and a carbon nanotube, one of whose terminus binds to said conductive surface at a site so that conduction between said conductive surface and said carbon nanotube is maintained, wherein a root of said carbon nanotube at the site where said carbon nanotube binds to said conductive surface is surrounded by a wall, said method comprising the steps of:
- (i) forming a plurality of carbon nanotube binding sites isolated from each other by walls on said conductive surface;
- and
- (ii) forming carbon nanotubes at the sites, wherein said step (i) further comprises a substep of forming a catalytic particle on said conductive surface at the site, and said step (ii) further comprises a substep of causing the carbon nanotube to grow from the surface of said catalytic particle at the site.
An electron emitting device comprising:
- a carbon nanotube device, which itself comprises a support having a conductive surface and a carbon nanotube, one of whose terminus binds to said conductive surface so that conduction between said conductive surface and said carbon nanotube is maintained, wherein a root of said carbon nanotube where said carbon nanotube binds to said conductive surface is surrounded by a wall;
- an electrode located at a position opposite to said conductive surface;
- and
- means for impressing a potential to a space between said conductive surface and said electrode, wherein said carbon nanotube is a carbon nanotube having grown on the surface of a catalytic particle, said catalytic particle conductively binding to said conductive surface.
An electron-emitting device comprising:
- a substrate;
- a cathode electrode disposed on the substrate;
- and
- a plurality of carbon nanotubes,
- wherein each root of the carbon nanotubes is electrically connected to the cathode electrode through a catalytic particle.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a catalytic particle present between the carbon nanotube and the electrically conductive layer.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a particle present between the carbon nanotube and the electrically conductive layer,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and conductively bonded to the electrically conductive layer;
- and
- a catalytic particle present between the electrically conductive layer and one of the two ends of the carbon nanotube.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and conductively bonded to the electrically conductive layer;
- and
- a particle present between the electrically conductive layer and one of the two ends of the carbon nanotube,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a catalytic particle disposed on the electrically conductive layer;
- and
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and conductively bonded to the electrically conductive layer,
- wherein the carbon nanotube is conductively bonded to the electrically conductive layer via the catalytic particle.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a particle disposed on the electrically conductive layer;
- and
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and conductively bonded to the electrically conductive layer,
- wherein the carbon nanotube is conductively bonded to the electrically conductive layer via the particle, and
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a catalytic particle disposed on the electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer via the catalytic particle.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a particle disposed on the electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer via the particle,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising;
- a substrate with an electrically conductive layer;
- a catalytic particle attached to the electrically conductive layer;
- and
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and bonded to the catalytic particle at one of the two ends,
- wherein the carbon nanotube is conductively bonded to the electrically conductive layer.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer,
- a particle attached to the electrically conductive layer;
- and
- a carbon nanotube having two ends in a longitudinal direction of the carbon nanotube and bonded to the particle at one of the two ends,
- wherein the carbon nanotube is conductively bonded to the electrically conductive layer, and
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a catalytic particle conductively bonded to the carbon nanotube.
An electron-emitting device comprising:
- an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a catalytic particle conductively bonded to the carbon nanotube and the electrically conductive layer.
An electron-emitting device comprising:
- an electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer,
- wherein the carbon nanotube has a catalytic particle.
An electron-emitting device comprising:
- an electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer;
- wherein the carbon nanotube has a catalytic particle, and
- wherein the catalytic particle is conductively bonded to the carbon nanotube and the electrically conductive layer.
An electron-emitting device comprising:
- a substrate with an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a particle conductively bonded to the carbon nanotube,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- an electrically conductive layer;
- a carbon nanotube conductively bonded to the electrically conductive layer;
- and
- a particle conductively bonded to the carbon nanotube and the electrically conductive layer,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- an electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer,
- wherein the carbon nanotube has a particle, and
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni.
An electron-emitting device comprising:
- an electrically conductive layer;
- and
- a carbon nanotube conductively bonded to the electrically conductive layer,
- wherein the carbon nanotube has a particle,
- wherein the particle comprises a metal selected from the group consisting of Fe, Co and Ni, and
- wherein the particle is conductively bonded to the carbon nanotube and the electrically conductive layer.
Dependencies are inferred from the claim text.