Merged logic and memory combining thin film and bulk Si transistors
AssigneeInternational Business Machines Corporation
InventorsPhilip George Emmma, Wei Hwang, Stephen McConnell Gates
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AssigneeInternational Business Machines Corporation
InventorsPhilip George Emmma, Wei Hwang, Stephen McConnell Gates
Estimating the term…
The present invention describes the use of two semiconductor layers, a thin film (TF) layer and a bulk Si wafer layer, to make high density and high speed merged logic and memory IC chips. The memory cells use three-dimensional (3D) SRAM structures. Two kinds of 3D logic cells are disclosed. 3D form of the differential cascode voltage switch (DCVS) architecture, and a 3D form of the DCVS with pass gate (DCVSPG) logic architecture. A high density “system on chip” architecture is described. The high density is achieved by locating large PMOS transistors in the TF Si layer, and the fast NMOS transistors in a bulk Si wafer layer. A single process sequence to simultaneously make the logic and memory circuits on the IC chip is also described.
A method of manufacturing a plurality of transistors in two distinct semiconductor levels in an integrated circuit (IC) chip comprising the steps of:
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