EDMOS device having a lattice type drift region
AssigneeElectronics and Telecommunications Research Institute
InventorsDae Woo Lee, Tae Moon Roh, Il Yong Park, Yil Suk Yang, Jong Dae Kim
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AssigneeElectronics and Telecommunications Research Institute
InventorsDae Woo Lee, Tae Moon Roh, Il Yong Park, Yil Suk Yang, Jong Dae Kim
Estimating the term…
The present invention provides an EDMOS (extended drain MOS) device having a lattice type drift region and a method of manufacturing the same. In the case of n channel EDMOS(nEDMOS), the drift region has a lattice structure in which an n lattice having a high concentration and a p lattice having a low concentration are alternately arranged. As a drain voltage is applied, a depletion layer is abruptly extended by a pn junction of the n lattice and the p lattice, so that the entire drift region is easily depleted. Therefore, a breakdown voltage of the device is increased, and an on resistance of the device is decreased due to the n lattice with high concentration.
An EDMOS device having a lattice type drift region, comprising:
Dependencies are inferred from the claim text.