Carrier device having a carrier surface with an opening for connecting with grooves
AssigneeUshiodenki Kabushiki Kaisha
InventorTakashi Kawahashi
Life of this patent
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Abstract
To devise a carrier device in which no air can accumulate between the flexible board and the carrier surface when the flexible board is held securely by vacuum suction by the carrier surface, the carrier surface of the carrier device on which the flexible board is placed is provided with an opening for supplying a vacuum and with several grooves which extend radially from the opening, the grooves being connected to one another only at the opening.
Claims14
Carrier device for securely holding a flexible board by vacuum suction, comprising a carrier surface for holding the flexible board which has a middle area and an edge area which surrounds the middle area, wherein the carrier surface is provided with an opening for supplying a vacuum and with several grooves which run radially outward from said opening, said grooves being connected to one another only at said opening.
Dependencies are inferred from the claim text.