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US 6,617,540 B2Granted
Wafer support fixture composed of silicon
AssigneeIntegrated Materials, Inc.
InventorRaanan Zehavi
Life of this patent
Estimating the term…
Abstract
A silicon wafer process fixture having various silicon members secured together. The fixture may include a plurality of generally elongate silicon support member secured to a generally planar silicon base. The silicon members may be made of monocrystalline silicon, polycrystalline silicon, or virgin polysilicon.
Claims15
A silicon wafer processing fixture, comprising:
- two silicon bases;
- and
- a plurality of axially extending silicon structural members consisting essentially of virgin polysilicon, the opposed ends of each of which are fixedly secured to respective ones of said bases and being configured to support a plurality of wafers.
A silicon wafer processing fixture comprising:
- a plurality of generally elongate silicon structural support members consisting essentially of virgin polysilicon each including an attachment elements extending outwardly from terminal ends thereof;
- and,
- two silicon bases each including a plurality of attachment element receiving portions each having a respective one of the attachment elements of the structural support members fixedly secured therein.
A method of fabricating a silicon wafer processing fixture, comprising the steps of:
- forming a plurality of axially extending virgin polysilicon structural members configured to support a plurality of wafers;
- and
- then securing opposed ends of each of said virgin polysilicon structural members to respective ones of two silicon bases.
A method of fabricating a silicon wafer processing fixture, comprising the steps of:
- forming a plurality of axially extending silicon members comprising virgin polysilicon and configured to support a plurality of wafers;
- and
- securing opposed ends of each of said silicon members to respective ones of two silicon bases.
Dependencies are inferred from the claim text.