Process and system for determining acceptibility of a fluid dispense
AssigneeMykrolis Corporation
InventorsJohn E. Pillion, Robert McLoughlin, Jieh-Hwa Shyu
Life of this patent
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Abstract
A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor is used to control further processing of the substrate.
Claims24
The process for determining the acceptability of a fluid dispense which comprises:
- providing a dispenser for dispensing a volume of fluid comprising said fluid dispense from a container containing said fluid and dispensing the discrete fluid volume from the container through the dispenser,
- illuminating said volume of fluid prior to said volume of fluid contacting a substrate with energy from an emitter,
- detecting energy transmitted from said volume of fluid to identify a shape of said fluid dispense, and
- comparing said shape with a previously identified standard shape to determine acceptability of said fluid dispense.
The system for determining the acceptability of a fluid dispense which comprises:
- a dispenser for dispensing a volume of fluid from a container containing said fluid,
- one or more energy sources for illuminating said volume of fluid prior to said volume of fluid contacting a substrate with energy
- one or more sensors for detecting energy transmitted from said volume of fluid to identify a shape of said fluid dispense, and
- means for comparing said shape with a previously identified shape to determine acceptability of said fluid dispense.
The process for determining the acceptability of a fluid dispense for coating a substrate in a second process with a process equipment for modifying said substrate, said process comprising the steps of:
- dispensing a volume of fluid comprising said fluid from a container containing said fluid onto said substrate,
- illuminating said volume of fluid prior to said volume of fluid contacting a substrate with energy from an energy emitter,
- detecting energy transmitted from said volume of liquid to identify a shape of said fluid dispense,
- comparing said shape and timing of the dispense with a previously identified standard shape or response output to determine the acceptability of said fluid dispense and dispense timing, and
- removing said substrate from said process equipment when the fluid dispense is determined to be unacceptable.
Dependencies are inferred from the claim text.