Treatment solution supply apparatus and treatment solution supply method

A treatment solution supply apparatus for supplying a treatment solution onto a substrate which is disposed in a predetermined processing position on a mounting portion, comprising:

• a treatment solution supply nozzle for supplying the treatment solution onto the substrate;
• a nozzle holder for releasably holding said treatment solution supply nozzle;
• a hole formed in a center of the processing position on the mounting portion;
• a light-emitting part for emitting a light through said hole in an upward direction;
• a light-receiving part, which is provided in said nozzle holder, for receiving the emitted light;
• and
• a specifying device for specifying, based on a position where said light-receiving part receives the light from said light-emitting part, a position of a center of the substrate disposed in the processing position;
• and
• wherein said treatment solution supply nozzle is disposed in a predetermined stand-by position, and
• wherein said nozzle holder is movable in three dimensions.

A treatment solution supply apparatus for supplying a treatment solution onto a substrate which is disposed in a predetermined processing position on a mounting portion, comprising:

• a treatment solution supply nozzle for supplying the treatment solution onto the substrate;
• a nozzle holder for releasably holding said treatment solution supply nozzle;
• a hole formed in a center of the processing position on the mounting portion;
• a laser displacement gauge which is provided in said nozzle holder, for detecting said hole;
• and
• a specifying device for specifying, based on a position of said hole detected by said laser displacement gauge, a position of a center of the substrate disposed in the processing position;
• and
• wherein said treatment solution supply nozzle is disposed in a predetermined stand-by position, and
• wherein said nozzle holder is movable in three dimensions.

A treatment solution supply apparatus for supplying a treatment solution onto a substrate which is disposed in a predetermined processing position on a mounting portion, comprising:

• a treatment solution supply nozzle for supplying the treatment solution onto the substrate;
• and
• a nozzle holder for releasably holding said treatment solution supple nozzle;
• wherein said treatment solution supply nozzle is disposed in a predetermined stand-by position and said treatment solution supply nozzle includes a receiving portion for allowing the inserting portion to be inserted therein;
• wherein said nozzle holder is movable in three dimensions and said nozzle holder includes an inserting portion, and
• wherein the inserting portion includes a pressing portion which is capable of pressing against the receiving portion from an inner side.