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US 6,615,994 B2Granted
Wafer boat
AssigneeIntel Corporation
InventorRuben S. Cu, Jr.
Life of this patent
Estimating the term…
Abstract
A frame of a wafer boat is retrofitted with brace assemblies. The frame has left and right vertically extending, horizontally spaced supports. Each support has a plurality of slots above one another. A plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers in respective ones of the slots of the left support and respective right edges of the wafers in respective ones of the slots of the right support. Each brace assembly includes a plurality of braces. Each brace has a respective upper surface in a respective position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted.
Claims15
A wafer boat comprising:
- a frame having left and right vertically extending, horizontally spaced supports each having a plurality of slots above one another so that a plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers inserted in respective ones of the slots of the left support and respective right edges of the wafers inserted in respective ones of the slots in the right support;
- at least one vertically extending mount bracket secured to the frame and having a plurality of gaps formed therein through which edges of respective wafers are adapted to be inserted between the supports;
- and
- a plurality of braces, mounted to the bracket and via the bracket to the frame, each having a respective upper surface in a position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted.
1 more element
A wafer boat comprising:
- a frame having left and right vertically extending, horizontally spaced supports each having a plurality of slots above one another so that a plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers in respective ones of the slots of the left support and respective right edges of the wafers in respective ones of the slots in the right support;
- a vertically extending left rear mount bracket;
- a vertically extending left front mount bracket;
- a plurality of left braces, each having a rear end secured to the left rear mount bracket and a front end secured to the left front mount bracket so as to form a left mount assembly, the left rear mount bracket being secured to a rear of the left support and the left front mount bracket being secured to a front of the left support;
- a vertically extending right rear mount bracket;
- a vertically extending right front mount bracket;
- and
- a plurality of right braces, each having a rear end secured to the right rear mount bracket and a front end secured to the right front mount bracket so as to form a right mount assembly, the right rear mount bracket being secured to a rear of the right support and the right front mount bracket being secured to a front of the right support, a lower surface of each wafer being supported at spaced locations by upper surfaces of one left brace and one right brace.
5 more elements
A wafer boat comprising:
- a frame having left and right vertically extending, horizontally spaced supports each having a plurality of slots above one another so that a plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers inserted in respective ones of the slots of the left support and respective right edges of the wafers inserted in respective ones of the slots in the right support;
- a vertically extending front mount bracket;
- a vertically extending rear mount bracket;
- and
- a plurality of braces, each brace having a front end secured to the front mount bracket and a rear end secured to the rear mount bracket to form a brace assembly, the front and rear mount brackets being secured to a front and a rear of the frame, respectively, so as to mount the brace assembly to the frame, each brace having a respective upper surface in a position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted.
2 more elements
A wafer boat comprising:
- a frame having left and right vertically extending, horizontally spaced supports each having a plurality of slots above one another so that a plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers inserted in respective ones of the slots of the left support and respective right edges of the wafers inserted in respective ones of the slots in the right support;
- and
- a plurality of braces, mounted to the frame, each having a respective upper surface in a position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted, wherein the two braces are spaced by a first distance between the locations where the two braces are adapted to support the wafer and by a second distance which is larger than the first distance and closer to a front of the frame.
Dependencies are inferred from the claim text.