Lock for vacuum chamber
AssigneeOTB Group B.V.
InventorsMarinus Franciscus Johannes Evers, Michael Adrianus Theodorus Hompus
Life of this patent
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Abstract
Lock for a vacuum chamber which lock has a passage comprising an outer sealing element and an inner sealing element which outer sealing element can be maintained in the closed position under the influence of the pressure difference caused by the vacuum in the vacuum chamber, and can be opened against the force caused by the pressure difference, which inner sealing element under pretension can be maintained in the opened position and comprises closing element for closing the inner sealing element against the pretension, the closing element comprise at least one electromagnet.
Claims17
Lock for a vacuum chamber, comprising:
- a passage having an outer sealing means and an inner sealing means,
- said outer sealing means being maintainable in a closed position under an influence of a pressure difference caused by a vacuum in the vacuum chamber, and being movable to a first open position against a force caused by said pressure difference,
- said inner sealing means under pretension can be maintained in a second open position and comprises closing means for closing the inner sealing means against said pretension,
- wherein the closing means comprise at least one electromagnet.
Vacuum chamber comprising:
- at least one lock having a passage with an outer sealing means and an inner sealing means;
- and
- a table, said table being displaceable along the passage and carrying said inner sealing means,
- said outer sealing means can be maintained in a closed position under an influence of a pressure difference caused by a vacuum in the vacuum chamber and can be maintained in a first open position against a force generated by said pressure difference,
- said inner sealing means can be maintained in a second open position under pretension and comprising closing means for closing the inner sealing means against said pretension,
- wherein the closing means comprise an electromagnet.
Dependencies are inferred from the claim text.