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US 6,611,045 B2Granted
Method of forming an integrated circuit device using dummy features and structure thereof
AssigneeMotorola, Inc.
InventorsEdward O. Travis, Sejal N. Chheda, Ruiqi Tian
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Abstract
A method for forming an integrated circuit device having dummy features and the resulting structure are disclosed. One embodiment comprises a first active feature separated from a substantially smaller second active feature by a dummy-available region void of active features. Within the dummy-available region and in close proximity to the second active feature exists a dummy feature.
Claims16
An integrated circuit device, comprising:
- a semiconductor substrate;
- a first active feature in the semiconductor substrate, wherein the first active feature has a first width;
- a second active feature in the semiconductor substrate, wherein the second active features has a second width substantially smaller than the first active feature;
- a first dummy-available region in the semiconductor substrate separating the first active feature from the second active feature by at least 20 microns, wherein the first dummy available-region is void of any active features;
- a first dummy feature in the first dummy-available region and in close proximity to the second active feature;
- and
- a second dummy-available region in the first dummy-available region separating the first dummy feature from the first active feature by at least 20 microns, wherein the second dummy-available region is void of dummy features.
4 more elements
An integrated circuit device, comprising:
- a first active feature region free from polishing dummy features;
- a polishing dummy feature region having a first polishing dummy feature density adjacent to and surrounding the first active feature region;
- and
- a dummy-available region adjacent to at least a portion of the polishing dummy feature region having a second polishing dummy feature density, wherein the second polishing dummy feature density is substantially less than the first polishing dummy feature density.
1 more element
Dependencies are inferred from the claim text.