System and method for controlling movement of a workpiece in a thermal processing system
AssigneeAxcelis Technologies, Inc.
InventorsAli Shajii, Brian Matthews, Jeffrey P. Hebb, John Danis
Life of this patent
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Abstract
A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
Claims44
A method for processing a workpiece in a thermal processing furnace according to an intended temperature profile, said method comprising the steps of
- measuring the temperature of the workpiece in the thermal processing furnace, and
- based upon the intended temperature profile and the measured temperature of the workpiece, regulating a position and a speed of the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
A system for processing a workpiece, comprising
- a thermal processing furnace having a process chamber,
- a feedback subsystem coupled to the thermal processing furnace for detecting a parameter of the workpiece when disposed in the processing chamber,
- a control facility for generating a control signal to regulate a position and a speed of the workpiece based upon an intended temperature profile of the workpiece and the parameter of the workpiece, and
- an elevator subsystem in communication with the control facility for moving the workpiece through the process chamber in response to the control signal to heat process the workpiece generally according to the intended temperature profile.
In a system for processing a workpiece in a thermal processing furnace, said method comprising the steps of
- providing the temperature of the workpiece in the thermal processing furnace,
- providing an intended temperature profile of the workpiece to be generally achieved during processing in the thermal processing furnace, and
- based upon the intended temperature profile and the measured temperature of the workpiece, regulating a position and a speed of the workpiece through the furnace to heat process the workpiece according to the intended temperature profile.
A method for processing a workpiece in a thermal processing furnace according to an intended temperature profile, said method comprising:
- measuring the temperature of the workpiece in the thermal processing furnace;
- determining the difference between the measured temperature and an intended temperature from the intended temperature profile to form an error signal;
- and
- regulating a position and a speed of the workpiece through the furnace, based on the error signal, to heat process the workpiece generally according to the intended temperature profile.
Dependencies are inferred from the claim text.