Automatic discharge apparatus for residual charge on an electrostatic chuck

Abstract

An automatic discharge apparatus for an electrostatic chuck includes a high voltage determining part having an external high voltage determination value supplied thereto. A high voltage generating transformer, electrically connected to an output of the high voltage determining part, generates the high voltage to be supplied to an electrostatic chuck under control of the high voltage determining part. A high voltage controlling part, electrically connected to the high voltage generating transformer and the electrostatic chuck, controls the high voltage supplied from the high voltage generating transformer to the electrostatic chuck in response to an on/off state of power supplied by a power supply. A discharge circuit part electrically connected between the electrostatic chuck and the power supply, forcibly discharges residual voltage remaining in the electrostatic chuck in response to an off state of the power supply.

Dependencies are inferred from the claim text.