Generation of exposure data having hierarchical structure
AssigneeFujitsu Limited
InventorKazunori Koike
Life of this patent
Estimating the term…
Abstract
A method of generating exposure data includes the steps of generating first exposure data representing a common portion shared by different exposure images, generating second exposure data representing portions which differ between the different exposure images, and defining at least one non-exposure area with regard to the first exposure data, the at least one non-exposure area corresponding to the portions that differ between the different exposure images and defining an area where no exposure is performed by the first exposure data.
Claims13
A method of generating exposure data, comprising the steps of:
- a) generating first exposure data representing a common portion shared by different exposure images;
- b) generating second exposure data representing portions which differ between the different exposure images;
- and
- c) defining at least one non-exposure area with regard to said first exposure data, said at least one non-exposure area corresponding to the portions that differ between the different exposure images and defining an area where no exposure is performed by said first exposure data.
A method of generating exposure data, comprising the steps of:
- a) setting coordinates in a file and allocating exposure data in reference to the coordinates;
- and
- b) setting a non-exposure area in the file, the non-exposure area defining an area where no exposure data is allocated.
A method of forming a pattern on a reticle by using exposure data, comprising the steps of:
- generating first exposure data representing a common portion shared by different exposure images;
- generating second exposure data representing portions which differ between the different exposure images;
- defining at least one non-exposure area with regard to said first exposure data, said at least one non-exposure area corresponding to the portions that differ between the different exposure images and defining an area where no exposure is performed by said first exposure data;
- printing an image of the common portion on the reticle by using said first exposure data with no exposure being performed at said at least one non-exposure area;
- and
- printing images of said second exposure data at the portions which differ between the different exposure images.
A device for generating exposure data, comprising:
- a CPU;
- and
- a memory storing a program for controlling said CPU, wherein said CPU operating based on the program stored in said memory carries out steps of:
- generating first exposure data representing a common portion shared by different exposure images;
- generating second exposure data representing portions which differ between the different exposure images;
- and
- defining at least one non-exposure area with regard to said first exposure data, said at least one non-exposure area corresponding to the portions that differ between the different exposure images and defining an area where no exposure is performed by said first exposure data.
A device for printing a pattern on a reticle by using exposure data, comprising:
- a CPU;
- and
- a memory storing a program for controlling said CPU, wherein said CPU operating based on the program stored in said memory carries out steps of:
- generating first exposure data representing a common portion shared by different exposure images;
- generating second exposure data representing portions which differ between the different exposure images;
- defining at least one non-exposure area with regard to said first exposure data, said at least one non-exposure area corresponding to the portions that differ between the different exposure images and defining an area where no exposure is performed by said first exposure data;
- printing an image of the common portion on the reticle as many times as there are the different exposure images by using said first exposure data with no exposure being performed at said at least one non-exposure area;
- and
- printing images of said second exposure data at the portions which differ between the different exposure images.
Dependencies are inferred from the claim text.