Selective method to form roughened silicon
AssigneeMicron Technology, Inc.
InventorsThomas A. Figura, Zhiqiang Wu, Li Li
Life of this patent
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Abstract
A method of forming silicon storage nodes on silicon substrates, wherein the silicon storage nodes have a roughened surface, which does not result in deposition of silicon atoms over the entire surface of the silicon substrate and which does not require the silicon storage nodes to be comprised of amorphous silicon prior to being subjected to the surface-roughening treatment.
Claims14
A method of forming at least one roughened surface on a silicon layer comprising:
- a) providing a substrate including a silicon layer having at least one interface with a layer of doped oxide;
- b) driving the dopants from the doped oxide into the silicon layer forming regions of doped silicon;
- c) removing the doped oxide to form at least one exposed surface of the silicon layer containing doped regions;
- and
- d) treating the substrate to form a roughened surface on at least one exposed surface of the silicon layer containing doped regions.
A silicon layer having at least one roughened surface thereon, wherein the roughened surface is comprised of protruding regions of silicon which contain dopants from a doped oxide, said silicon layer being prepared by the process comprising the steps of:
- a) providing a silicon substrate comprised of a silicon layer having at least one interface with a layer of doped oxide;
- b) driving dopants from the doped oxide into the silicon layer forming regions of doped silicon;
- c) removing the doped oxide to form at least one exposed surface of the silicon layer containing doped regions;
- and
- d) treating the silicon substrate to form a roughened surface on at least one exposed surface of the silicon layer containing doped regions,
- thereby forming a silicon layer having at least one roughened surface thereon, wherein the roughened surface is comprised of protruding regions of silicon which contain dopants from the doped oxide.
Dependencies are inferred from the claim text.