Bubbler
AssigneeShipley Company, L.L.C.
InventorsMichael L. Timmons, Richard J. Colby, Robert S. Stennick
Life of this patent
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Abstract
Disclosed are dual chambered bubbler designs for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems.
Claims12
A bubbler-type device for providing vaporized organometallic compound to a chemical vapor deposition system comprising a vessel having an elongated cylindrical shaped portion having an inner surface defining a substantially constant cross-section throughout the length of the cylindrical portion, a top closure portion, a bottom closure portion, and inlet and outlet chambers in fluid communication and separated by a porous element, the top closure portion having a fill plug and a gas inlet opening, the fill plug and gas inlet opening communicating with the inlet chamber, an outlet opening communicating with the outlet chamber, the inlet chamber having a conical shaped lower portion containing the porous element, the porous element being spaced from the bottom closure portion, the porous element forming the floor of the inlet chamber, and wherein the conical shaped lower portion decreases in cross-section toward the porous element.
Dependencies are inferred from the claim text.