Polishing composition and method
AssigneesShowa Denko K.K., Yamaguchi Seiken Kogyo Co., Ltd.
InventorsKen Ishitobi, Masahiro Nozaki, Tadanori Nagao, Yoshiki Hayashi
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Abstract
To provide a polishing composition which enables maintenance of excellent properties and high quality of the surface of a hard disk without lowering polishing rate during polishing of the surface, and which can provide a polished surface in which the amount of dub-off is considerably reduced as compared with that of a conventional level, a polishing composition containing water, a polishing material (particularly alumina), a polishing accelerator, and at least one of hydroxypropyl cellulose and hydroxyalkyl alkyl cellulose is provided.
Claims10
A hard-disc polishing composition comprising water, a polishing material, a polishing accelerator, and at least one of hydroxypropyl cellulose or hydroxyalkyl cellulose,
- wherein the polishing accelerator comprises an organic acid and at least one of an organic acid salt or an inorganic acid salt.
Dependencies are inferred from the claim text.