Auxiliary heat-insulating jig
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMasashi Minami, Ikuo Katsurada
Life of this patent
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Abstract
An auxiliary heat-insulating jig is provided between a wafer boat and a heat-insulating jig. The auxiliary heat-insulating jig comprises a plurality of vertically arranged plate insulators. The plate insulators are made of opaque quartz. Thus, an auxiliary heat-insulating jig necessary for modifying a high-speed temperature-control heat treatment apparatus of an intermediate temperature specification to a high-speed temperature-control heat treatment apparatus of a high-temperature specification is provided.
Claims10
An auxiliary heat-insulating jig, provided between a wafer boat and a heat-insulating jig in a vertical heat treatment apparatus comprising said wafer boat and said heat-insulating jig, comprising:
- a plurality of vertically arranged plate insulators, wherein
- said plate insulators are made of opaque quartz,
- reinforcing parts reinforcing said plate insulators are provided on at least single surfaces of said plate insulators, said reinforcing parts include:
- (a) portions, having a larger thickness than the remaining portions, radially extending from the central portions of said plate insulators, and/or
- (b) portions, having a larger thickness than the remaining portions, forming circumferences apart from the central portions of said plate insulators, and said reinforcing parts are integrally formed with said plate insulators.
An auxiliary heat-insulating jig mounted on a wafer boat, comprising a support provided on its side wall with a plurality of vertically arranged first notches for receiving semiconductor substrates in said first notches and supporting said semiconductor substrates, comprising:
- a plurality of vertically arranged plate insulators having a thickness rendered substantially identical to the thickness of said semiconductor substrates and provided with reinforcing parts on at least single surfaces thereof, wherein
- second notches are provided on the outer peripheral portions of said plate insulators for receiving an extension part of said support to be capable of fixing said plurality of plate insulators by engaging said second notches in first notches provided in said extension part of said support.
A wafer boat having an auxiliary heat-insulating jig mounted thereon, wherein
- said auxiliary heat-insulating jig includes a plurality of vertically arranged plate insulators, and
- said plate insulators are made of opaque quartz,
- reinforcing parts reinforcing said plate insulators are provided on at least single surfaces of said plate insulators, said reinforcing parts include:
- (a) portions, having a larger thickness than the remaining portions, radially extending from the central portions of said plate insulators, and/or
- (b) portions, having a larger thickness than the remaining portions, forming circumferences apart from the central portions of said plate insulators, and said reinforcing parts are integrally formed with said plate insulators.
A vertical heat treatment apparatus comprising:
- a wafer boat;
- and
- an auxiliary heat-insulating jig mounted on said wafer boat, wherein
- said auxiliary heat-insulating jig includes a plurality of vertically arranged plate insulators, and
- said plate insulators are made of opaque quartz,
- reinforcing parts reinforcing said plate insulators are provided on at least single surfaces of said plate insulators, said reinforcing parts include:
- (a) portions, having a larger thickness than the remaining portions, radially extending from the central portions of said plate insulators, and/or
- (b) portions, having a larger thickness than the remaining portions, forming circumferences apart from the central portions of said plate insulators, and
- said reinforcing parts are integrally formed with said plate insulators.
A vertical heat treatment apparatus comprising a wafer boat having an auxiliary heat-insulating jig mounted thereon, wherein
- said auxiliary heat-insulating jig includes a plurality of vertically arranged plate insulators, and
- said plate insulators are made of opaque quartz,
- reinforcing parts reinforcing said plate insulators are provided on at least single surfaces of said plate insulators, said reinforcing parts include:
- (a) portions, having a larger thickness than the remaining portions, radially extending from the central portions of said plate insulators, and/or
- (b) portions, having a larger thickness than the remaining portions, forming circumferences apart from the central portions of said plate insulators, and
- said reinforcing parts are integrally formed with said plate insulators.
Dependencies are inferred from the claim text.