Stage device, exposure apparatus incorporating the stage device, and method of using the same
AssigneeNikon Corporation
InventorKazuaki Saiki
Life of this patent
Estimating the term…
Abstract
A stage device, usable in, e.g., an exposure apparatus, can include an inexpensive passive type vibration control pad system, while avoiding problems such as contact between stationary and movable parts and deterioration of stage control performance. The stage device includes a stage main body that moves on a base, and a support that is vibrationally isolated from the base. A movable part is disposed on the stage main body. A stationary part is supported by the support, the movable part moving relative to the stationary part. A detector detects a size of a gap between the movable part and the stationary part. An actuator adjusts a relative positional relationship between the movable part and the stationary part based on the detected gap size.
Claims49
A stage device comprising:
- a stage main body that moves on a base and that has a mounting surface on which an object is mounted;
- a drive that drives the stage main body, the drive having a movable part disposed on the stage main body and a stationary part;
- a support that is vibrationally isolated from the base and that supports the stationary part, the movable part moving relative to the stationary part;
- a detector that detects a size of a gap between the movable part and the stationary part in a direction perpendicular to the mounting surface;
- and
- an actuator that adjusts a relative positional relationship between the movable part and the stationary part in the direction perpendicular to the mounting surface based on the detected gap size.
An exposure apparatus in which a pattern of a mask held by a mask stage is exposed onto a substrate held by a substrate stage, comprising:
- a base that movably supports one of the mask stage and the substrate stage and that has a mounting surface on which one of the mask and the substrate is mounted;
- a drive that drives the one of the stages, the drive having a movable part disposed on the one of the stages and a stationary part;
- a support that is vibrationally isolated from the base and that supports the stationary part, the movable part moving relative to the stationary part;
- a detector that detects a size of a gap between the movable part and the stationary part in a direction perpendicular to the mounting surface;
- and
- an actuator that adjusts a relative positional relationship between the movable part and the stationary part in the direction perpendicular to the mounting surface based on the detected gap size.
A stage device comprising:
- a stage main body that moves in a plane that is parallel to a surface of a base;
- a drive that drives the stage main body, the drive having a movable part disposed on the stage main body and a stationary part;
- a reaction frame that is vibrationally isolated from the base and that supports the stationary part, the reaction frame receiving a reaction force that is generated due to a movement of the stage main body in the plane, the movable part moving relative to the stationary part;
- a detector that detects a size of a gap between the movable part and the stationary part in a direction perpendicular to the plane in which the stage main body moves;
- and
- an actuator that adjusts a relative positional relationship between the movable part and the stationary part in the direction perpendicular to the plane in which the stage main body moves based on the detected gap size.
An exposure apparatus in which a pattern of a mask held by a mask stage is exposed onto a substrate held by a substrate stage, comprising:
- a base that movably supports one of the mask stage and the substrate stage, the one of the stages moving in a plane that is parallel to a surface of the base;
- a drive that drives the one of the stages, the drive having a movable part disposed on the one of the stages and a stationary part;
- a reaction frame that is vibrationally isolated from the base and that supports the stationary part, the reaction frame receiving a reaction force that is generated due to a movement of the one of the stages in the plane, the movable part moving relative to the stationary part;
- a detector that detects a size of a gap between the movable part and the stationary part in a direction perpendicular to the plane in which the one of the stages moves;
- and
- an actuator that adjusts a relative positional relationship between the movable part and the stationary part in the direction perpendicular to the plane in which the one of the stages moves based on the detected gap size.
A method of operating a stage device in which a stage main body moves on a base, the stage main body has a mounting surface on which an object is mounted, a drive has a movable part disposed on the stage main body and a stationary part to drive the stage main body, and a support that is vibrationally isolated from the base and that supports the stationary part, the movable part moving relative to the stationary part, the method comprising:
- detecting a size of a gap between the movable part and the stationary part in a direction perpendicular to the mounting surface;
- and
- adjusting a relative positional relationship between the movable part and the stationary part in the direction perpendicular to the mounting surface based on the detected gap size.
An exposure apparatus in which a pattern of a mask held by a mask stage is exposed onto a substrate held by a substrate stage, comprising:
- a projection system disposed between the mask and the substrate to project the pattern onto the substrate;
- a base that movably supports one of the mask stage and the substrate stage, the one of the stages moving in a plane that is parallel to a surface of the base;
- a drive that drives the one of the stages, the drive having a movable part connected to the one of the stages and a stationary part;
- a frame that is vibrationally isolated from the base and that supports the stationary part;
- a detector that detects a size of a gap between the movable part and the stationary part along an optical axis of the projection system;
- and
- a controller that controls the drive based on the detected gap size.
Dependencies are inferred from the claim text.