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US 6,605,861 B2Granted
Semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorYoshihiko Toyoda
Life of this patent
Estimating the term…
Abstract
Chip element formation areas and scribe line areas dividing the chip formation areas are formed on a wafer. On each scribe line area, an interconnection surrounds each chip formation area, and extends to near an edge of a wafer. With this arrangement, it is possible to provide a semiconductor device and a manufacturing method which can reduce a difference in the depositing rate of plating between the center and the periphery of the wafer.
Claims10
A semiconductor device comprising
- a semiconductor wafer including:
- a plurality of chip formation areas, each chip formation area having a plated conductive layer, wherein at least a first chip formation area and a second chip formation area are successively adjacent to each other and lie along a straight line in a first direction;
- a scribe line area separating said plurality of chip formation areas from each other;
- and
- an interconnection in said scribe line area, not entering said chip formation areas, and extending to near an edge of said wafer, wherein at least part of said interconnection extends alongside said first and second chip formation areas in the first direction.
2 more elements
A semiconductor comprising
- a semiconductor chip produced by scribing and breaking a semiconductor wafer along scribe lines defining side surfaces of said semiconductor chip, said semiconductor chip including:
- a chip formation area having a plated conductive layer;
- a remaining scribe line area remaining after scribing and breaking the semiconductor wafer, said remaining scribe line area surrounding said chip formation area;
- and
- interconnections in said remaining scribe line area surrounding but not entering said chip formation area, and reaching an edge of said semiconductor chip.
2 more elements
Dependencies are inferred from the claim text.