Bonded sapphire polygon shield
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorAnthony DeFeo
Life of this patent
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AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorAnthony DeFeo
Estimating the term…
A shield for protecting silicon wafers. The shield includes a plurality of single crystal shielding members having a lattice unit cell repeated substantially throughout. The unit cell has a periodic arrangement of atoms defining a set of lattice planes. The shielding members each include a pair of first interface surfaces having an orientation substantially aligned along one of the set of lattice planes. The shield also includes a plurality of single crystal structural members each having substantially the same lattice unit cell as that of the shielding members repeated substantially throughout. The structural members each include a pair of second interface surfaces having an orientation substantially aligned along the same one of the set of lattice planes. The plurality of shielding members and structural members are alternately bonded together at their respective first and second interface surfaces to define an enclosed area sized to receive the silicon wafers therein.
A shield for protecting silicon wafers, the shield comprising:
A shield for protecting silicon wafers, the shield comprising:
A shield for protecting silicon wafers, the shield comprising:
Dependencies are inferred from the claim text.