Method of separating composite member and process for producing thin film
AssigneeCanon Kabushiki Kaisha
InventorsKazuaki Ohmi, Katsumi Nakagawa, Nobuhiko Sato, Kiyofumi Sakaguchi, Kazutaka Yanagita, Takao Yonehara
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Abstract
To cause a crack at a fixed position in a separation layer, a method of separating a composite member includes the steps of forming a separation layer inside a composite member, forming inside the separation layer a stress riser layer in which an in-plane stress has concentratedly been produced to an extent that does not cause separation by the in-plane stress, and enlarging the in-plane stress to cause a crack in the stress riser layer, thereby separating the composite member.
Claims2
A method of separating a composite member, comprising the steps of;
- forming on a surface of a first substrate a first porous layer and a second porous layer having a higher porosity than the first porous layer, said first and second porous layers being in the single-crystalline state;
- oxidizing the first and the second porous layers to form oxide films on pore inner-wall surfaces of the first porous layer and make the second porous layer amorphous such that the insides of the pore walls of the first porous layer remain in the single-crystalline state and the entirety of the pore walls of the second porous layer are amorphous;
- forming a non-porous layer on a layer surface of the first porous layer;
- bonding the non-porous layer to a second substrate to form a composite member having a separation layer internally;
- and
- causing a crack in the separation layer to separate the composite member.
Dependencies are inferred from the claim text.