Method for the manufacture of micro-mechanical components
AssigneeInfineon Technologies AG
InventorsMartin Franosch, Reinhard Wittmann, Catharina Pusch
Life of this patent
Estimating the term…
Abstract
A method for the manufacture of micro-mechanical components from a stack of layers having at least a substrate, a sacrificial layer and a layer which is to be undercut includes forming at least one etch hole in the layer, which is to be undercut, and providing at least one passivation layer for controlling a selective depositing of a cover material which closes each of the etch holes after a step of etching the sacrificial layer. The passivation layer makes it possible that the undercut layer elements do not become excessively thick or grow together with the substrate due to the deposition of the cover material.
Claims21
A method for the manufacture of micro-mechanical components with at least one undercut layer element, said method comprising the steps of providing a layer stack that has a sacrificial layer, applied on a substrate and a first layer, which is to be undercut, applied on the sacrificial layer;
- forming at least one etch hole in the first layer;
- isotropically etching the sacrificial layer so that the at least one undercut layer element is created;
- creating a passivation layer on the surface region between the at least one undercut layer element and the substrate;
- and selectively depositing a cover material relative to the passivation layer so that each etch hole is closed.
A method for manufacturing micro-mechanical components with at least one undercut layer element, said method comprising the steps of providing a layer stack having a substrate, with a first passivation layer on said substrate, a sacrificial layer being applied on the first passivation layer, and a first layer, which is to be undercut, being applied on the sacrificial layer;
- forming at least one etch hole through the first layer;
- isotropically etching the sacrificial layer to create the at least one undercut layer element;
- and selectively depositing a cover material relative to the first passivation layer so that each etch hole is closed.
A method for manufacturing micro-mechanical components with undercut layer elements, said method comprising the steps of providing a layer stack having a substrate, a sacrificial layer applied on the substrate, a passivation layer and a first layer, which is to be undercut;
- creating at least one etch hole through the first layer and through the passivation layer;
- isotropically etching the sacrificial layer so that the at least one undercut layer element is generated;
- selectively depositing a cover material relative to the passivation layer.
Dependencies are inferred from the claim text.