Alternative PSM with new phase conflict canceling method
AssigneeNanya Technology Corporation
InventorChung-Wei Hsu
Life of this patent
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Abstract
An alternative PSM, including: a first transparent region in 0 degree phase, formed on the surface of a transparent substrate; and a second transparent region in 180 degree phase, constructed of a concave portion of the transparent substrate. The first transparent region and the second transparent region are alternatively arranged. A third transparent region in 85-95 degree phase, constructed of a translucent layer, is formed on the border between the first transparent region and the second transparent region. The third transparent region in 85-95 degree phase used as a light intensity buffer so as to effectively cancel phase conflict.
Claims15
A method of manufacturing an alternative PSM, comprising the steps of:
- providing a transparent substrate;
- sequentially forming a translucent layer and a light-shielding layer on said transparent substrate;
- defining said light-shielding layer to form a light-shielding pattern;
- etching said translucent layer to expose said transparent substrate to form a first transparent region in 0 degree phase by using said light-shielding pattern as a mask;
- and
- defining said first transparent region in 0 degree phase to alternatively form a second transparent region in 180 degree phase, wherein a part of said translucent layer is left on a common border between said first transparent region in 0 degree phase and said second transparent region in 180 degree phase to form a third translucent region in 85-95 degree phase.
An alternative PSM, comprising:
- a transparent substrate, which has a substrate surface and a concave portion;
- a first transparent region in 0 degree phase, formed on a surface of said transparent substrate;
- and
- a second transparent region in 180 degree phase, alternatively arranged with said first transparent region in 0 degree phase, wherein said second transparent region in 180 degree phase is constructed of the concave portion of said transparent substrate, and wherein a part of a translucent layer is left on a common border between said first transparent region in 0 degree phase and said second transparent region in 180 degree phase to form a third translucent region in 85-95 degree phase.
Dependencies are inferred from the claim text.