Electrostatic chuck

Abstract

The present invention provides an electrostatic chuck that is able to completely prevent abnormal discharge that not only causes damage and destruction of the electrostatic chuck, but also causes damage of the fixed substrate as well as the generation of particles. In the electrostatic chuck of the present invention, at least a first insulating member, on the side on which a fixed substrate is placed among a first insulating member and second insulating member disposed in mutual opposition between which an electrode is interposed, is composed of a compound sintered body having for its main components 4% by weight to 12% by weight silicon carbide particles and aluminum oxide particles, and the first insulating member has varistor characteristics such that the volumetric specific resistance value of the first insulating member is from 1×109 to 1×1012 Ω· cm when the potential difference between the surface of the first insulating member on which the fixed substrate is placed and the electrode is 1000 V or less, and from 1×107 to 1×108 Ω· cm when the potential difference between the surface of the first insulating member on the side on which the fixed substrate is placed and the electrode is 3000 V or more.

Dependencies are inferred from the claim text.