Electrostatic chuck susceptor and method for fabrication

An electrostatic chuck, comprising:

• a) a chuck body;
• b) an electrode including a first metal, said electrode being embedded in the chuck body;
• c) a first electrical contact, said first electrical contact extending from the electrode, and including an alloy of said first metal and a second metal, wherein essentially all of the second metal is dissolved in the first metal;
• d) a metallic heating element embedded in the chuck body;
• and
• e) a second electrical contact extending from the metallic heating element, said second electrical contact including an alloy having a metal component common to the metallic heating element, said alloy consisting essentially of a solution of metal elements.

The method of forming an electrostatic chuck, comprising the steps of:

• a) molding a first portion of a green form of ceramic material;
• b) forming a recess in said first portion of the green form;
• c) depositing an electrical contact precursor in said recess, the electrical contact precursor including a first metal and a second metal;
• d) depositing an electrode or an electrode precursor onto said first portion of the green form, whereby the electrode or electrode precursor overlays said electrical contact precursor;
• e) molding a second portion of the green form of the ceramic material onto the electrode or electrode precursor;
• and
• f) heating the green form, thereby forming the electrostatic chuck, wherein the second metal of the electrical contact precursor essentially is completely dissolved or essentially completely soluble in the first metal of said electrical contact precursor.

A method of forming an electrostatic chuck comprising the steps of:

• a) forming a chuck body including an embedded electrode;
• b) forming an opening thereby exposing a portion of the embedded electrode;
• c) depositing an electrical contact precursor at the exposed portion of the electrode, wherein both the electrode and the electrical contact precursor include a first metal and at least one of either the electrode or the electrical contact precursor includes an alloy of said first metal and a second metal, all of the second metal being essentially dissolved in the first metal;
• and
• d) heating the electrical contact precursor thereby forming the electrostatic chuck.

An electrostatic chuck, comprising:

• a) a chuck body;
• b) an electrode including a first metal, said electrode being embedded in the chuck body;
• and
• c) an electrical contact extending from the electrode, said electrical contact including an alloy of said first metal and a second metal, wherein essentially all of the second metal is dissolved in the first metal.

An electrostatic chuck, comprising:

• a) a chuck body;
• b) an electrode embedded in the chuck body, said electrode including an alloy of a first metal and a second metal, wherein essentially all of the second metal is dissolved in the first metal;
• and
• c) an electrical contact extending from the electrode, said electrical contact including the first metal.