Overvoltage protection device

A semiconductor overvoltage protection device in the form of a four layer diode having:

• first and third layers of a first conductivity semiconductor material;
• second and fourth layers of a second conductivity type semiconductor material;
• a first buried region of the first conductivity type in the third layer adjacent to the junction between the second and third layers, the buried region having a greater impurity concentration than the third layer;
• and a second buried region of the same conductivity type as and of higher impurity concentration than said first buried region in said first buried region adjacent to said junction;
• wherein:
• said first layer is penetrated by a plurality of dots of said second layer extending through said first layer;
• said second buried region is formed with a plurality of separate regions of small area arranged so that reverse breakdown of the junction preferentially occurs through said second buried region, said regions being laterally offset from said dots and one or more of said separate regions having a lateral dimension greater than that of the associated dot;
• said dots do not overlie portions of said second buried region;
• And the ratio of impurity concentration in said first and second buried regions is such that the breakdown voltage between said second layer and said first buried region exceeds the breakdown voltage between said second layer and said second buried region by no more than 5%.

A semiconductor overvoltage protection device in the form of a four layer diode having:

• first and third layers of a first conductivity semiconductor material;
• second and fourth layers of a second conductivity type semiconductor material;
• a first buried region of the first conductivity type in the third layer adjacent to the junction between the second and third layers, the buried region having a greater impurity concentration than the third layer;
• and a second buried region of the same conductivity type as and of higher impurity concentration than said first buried region in said first buried region adjacent to said junction;
• wherein:
• said first layer is penetrated by a plurality of dots of said second layer extending through said first layer;
• said first buried region is formed with a plurality of separate regions of small area arranged so that reverse breakdown of the junction preferentially occurs through said second buried region;
• each said dot vertically overlies a respective region of said first buried region;
• said dots do not overlie portions of said second buried region;
• the ratio of impurity concentration in said first and second buried regions is such that the breakdown voltage between said second layer and said first buried region exceeds the breakdown voltage between said second layer and said second buried region by no more than 5%;
• and one or more of said separate regions has a lateral dimension greater than that of the associated dot.