Method and system for providing a polysilicon stringer monitor
AssigneeAdvanced Micro Devices, Inc.
InventorsMasaaki Higashitani, Hao Fang
Life of this patent
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Abstract
A system and method detecting the presence of polysilicon stringers on a memory array using a polysilicon stringer monitor. The polysilicon stringer monitor includes a continuous type-2 layer of polysilicon forming a first row and a second row across the active region and covering the active region in-between the first and second rows. The polysilicon stringer monitor further includes a continuous type-1 layer of polysilicon extending under the first row, wherein the type-1 layer also covers the active area in-between the first and second rows as well as covers the active area under the second row.
Claims2
A method for creating a poly 1 stringer monitor, comprising the steps of:
- (a) creating active regions over a substrate;
- (b) patterning a poly1 layer over the active region such that the poly1 layer also covers the area of the substrate where one word line in a pair of word lines will be located;
- (c) patterning a continuous poly2 layer over the substrate to form the word lines such that the poly2 layer extends between each pair of word lines over the active area;
- (d) etching the poly1 layer outside each pair of word lines over the active area;
- and for each pair of word lines, connecting the word line having a layer of poly1 to an external pad so that any poly1 stringers that occur after etching may be detected.
Dependencies are inferred from the claim text.