US 6,602,755 B1Granted

Method for manufacturing a compact bipolar transistor structure

AssigneeNational Semiconductor Corporation

InventorVassili Kitch

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Abstract

A bipolar transistor structure that includes a semiconductor material substrate that has a bottom substrate and base region of a first conductivity type and a buried layer, collector region and sink region of a second conductivity type. The substrate has an extrinsic base region of the first conductivity type and an emitter region of the second conductivity type, both of which extend from the substrate's upper surface into the base region. The bipolar transistor structure also includes a single patterned polysilicon layer with a first polysilicon portion of the first conductivity type in contact with the extrinsic base region and a second polysilicon portion of the second conductivity type in contact with the emitter region. The bipolar transistor structure is compact since contact to the extrinsic base region is made by the first polysilicon portion, which can be formed to a minimum dimension and self-aligned to the extrinsic base region. The extrinsic base and base regions can, therefore, be small, providing a low extrinsic base resistance, low base resistance and low collector-base capacitance. A process for forming such a bipolar transistor structure includes depositing a polysilicon layer and then implanting dopant ions of the first and second conductivity types into the polysilicon layer using first and second patterned mask layers, respectively. After etching the polysilicon layer, a thermal treatment creates an extrinsic base region and an emitter region by diffusing ions from the etched polysilicon layer. The process is inexpensive since it employs only a single patterned polysilicon layer.

A method for forming a bipolar transistor structure, the method comprising the steps of:

providing a semiconductor material substrate having:
a bottom substrate of a first conductivity type;
a buried layer of a second conductivity type overlying the bottom substrate;
a collector region of the second conductivity type overlying the buried layer;
a sink region of the second conductivity type extending from the upper surface of the semiconductor material substrate to the buried layer, the sink region being adjacent to the collector region;
and
a base region of the first conductivity type overlying the collector region and spaced apart from the sink region;
depositing a polysilicon layer overlying the upper surface of the semiconductor material substrate;
forming a first patterned mask layer on the polysilicon layer;
implanting dopant ions of the first conductivity type into the polysilicon layer using the first patterned mask layer as an implantation mask;
removing the first patterned mask layer;
forming a second patterned mask layer on the polysilicon layer;
implanting dopant ions of the second conductivity type into the polysilicon layer using the second patterned mask layer as an implantation mask;
removing the second patterned mask layer;
forming a third patterned mask layer on the polysilicon layer;
etching the polysilicon layer using the third patterned mask layer as an etch mask to form a patterned polysilicon layer with a first polysilicon portion of the first conductivity type and a second polysilicon portion of the second conductivity type;
and
subjecting the semiconductor material substrate and the patterned polysilicon layer to a thermal treatment such that dopant ions of the first conductivity type are diffused from the first polysilicon portion into the base region, thereby creating an extrinsic base region of the first conductivity type and such that dopant ions of the second conductivity type are diffused from the second polysilicon portion into the base region, thereby creating an emitter region of the second conductivity type, the emitter region being spaced apart from the extrinsic base region.

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Abstract

Claims6