US 6,599,405 B2 · Recessed sputter target

Abstract

The method manufactures sputter target assemblies. It first includes the step of manufacturing a target insert. The target insert has a yield strength, a diameter, a height, a planar top surface and a conical-shaped rear surface. Then a backing plate is manufactured. The backing plate has a cylindrical recess that corresponds to the diameter of the target insert. The cylindrical recess has a depth less than the height of the target insert and a yield strength less than the yield strength of the target insert. Finally, pressing the target insert into the cylindrical recess of the backing plate bonds the target insert to the backing plate to form a target assembly. The pressed target assembly contains the target insert with the conical-shaped rear surface.

Claims12

Dependent claims

A method of manufacturing a sputter target assembly comprising the steps of:

a) pressing a target insert having a near final shape into a backing plate, the target insert having a yield strength, a diameter, a height, a planar top surface and a frusta-conical rear surface;
b) providing a backing plate, the backing plate having a cylindrical recess corresponding to the diameter of the target insert, the cylindrical recess having a depth less than the height of the target insert and a yield strength less than the yield strength of the target insert;
and
c) hot pressing the target insert into the cylindrical recess of the backing plate to a state of plastic deformation so as to diffusion bond the target insert to the cylindrical recess of the backing plate to form the target assembly, the target assembly containing the target insert with the frusta-conical rear surface.

1 more element

Dependencies are inferred from the claim text.

Recessed sputter target

Life of this patent

Recessed sputter target

Life of this patent

Abstract

Claims12