Vacuum processing apparatus
AssigneeTokyo Electron Limited
InventorSakae Nakatsuka
Life of this patent
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Abstract
A vacuum process system having a vacuum process container. Located inside the vacuum process container is a supporting table for supporting thereon an object to be processed, a presser member for pressing the top surface of the peripheral portion of the object onto the supporting table, and a shower head facing the supporting table. The shower head has a large number of gas nozzles in the bottom face thereof. The bottom face of the shower head has a facing portion positioned substantially directly above the inner peripheral edge of the presser member and a non-facing portion. The facing portion has nozzles with larger diameters than the non-facing portion or a higher density of nozzles than the non-facing portion.
Claims6
A vacuum process system comprising:
- a vacuum process container having therein a supporting table for supporting thereon an object to be processed;
- a presser member for pressing a top surface of a peripheral portion of said object to fix said object to said supporting table;
- and
- a shower head part facing said supporting table and having a number of gas nozzles in a bottom face thereof;
- wherein said bottom face of said shower head part is divided into a facing portion positioned substantially directly above an inner peripheral edge of said presser member, and a non-facing portion present inside and outside of said facing portion;
- wherein a diameter of at least part of said gas nozzles in said facing portion of said shower head part is set to be greater than a diameter of said gas nozzles in said non-facing portion.
A vacuum process system comprising:
- a vacuum process container having therein a supporting table for supporting thereon an object to be processed;
- a presser member for pressing a top surface of a peripheral portion of said object to fix said object to said supporting table;
- and
- a shower head part facing said supporting table and having a number of gas nozzles in a bottom face thereof;
- wherein said bottom face of said shower head part has an annular region, an inner region inside of said annular region, and an outer region outside of said annular region;
- wherein said annular region is formed substantially directly above the inner peripheral edge of said presser member along the shape of said inner peripheral edge;
- wherein a diameter of at least part of said gas nozzles in said annular region is set to be greater than a diameter of said gas nozzles in the inner region and the outer region.
A vacuum process system comprising:
- a vacuum process container having therein a supporting table for supporting thereon an object to be processed;
- a presser member for pressing a top surface of a peripheral portion of said object to fix said object to said supporting table;
- and
- a shower head part facing said supporting table and having a number of gas nozzles in a bottom face thereof,
- wherein said bottom face of said shower head part is divided into a facing portion positioned substantially directly above said inner peripheral edge of said presser member, and non-facing portions present inside and outside of said facing portion,
- wherein a density of said gas nozzles in at least part of said facing portion of said shower head part is set to be greater than a density of said gas nozzles in each non-facing portion.
Dependencies are inferred from the claim text.