Method for determining a preceding wafer group
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHiroaki Ishizuka, Shigeru Matsumoto
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Abstract
In the method for determining a preceding wafer, at least one semiconductor wafer is determined as a preceding wafer among a plurality of semiconductor wafers constituting one lot. The preceding wafer is then subjected to a given process among a plurality of processes for fabrication of a semiconductor device. The determination of the preceding wafer is based on processing results of an upstream process among the plurality of processes performed for the plurality of semiconductor wafers prior to the given process. After examination of processing results of the given process on the preceding wafer, the given process is performed for the plurality of semiconductor wafers other than the preceding wafer.
Claims2
A method for determining a preceding wafer group, comprising the steps of:
- determining a preceding wafer group comprising at least one semiconductor wafer among a plurality of semiconductor wafers constituting one lot;
- performing a given process among a plurality of processes for fabrication of a semiconductor device for the preceding wafer group;
- and
- performing the given process for the plurality of semiconductor wafers other than the preceding wafer group after examination of processing results of the given process on the preceding wafer group,
- wherein the step of determining the preceding wafer group includes determining the preceding wafer group based on processing results of an upstream process among the plurality of processes performed for the plurality of semiconductor wafers constituting one lot prior to the given process.
Dependencies are inferred from the claim text.