Process chamber lid service system
AssigneeApplied Materials, Inc.
InventorsShinichi Kurita, Wendell T. Blonigan
Life of this patent
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Abstract
Provided herein is a process chamber lid service system comprising a process chamber lid service cart and a process chamber lid service frame. The lid service frame holds the process chamber lid. The cart and the lid service frame are aligned with guide pin and alignment capture, meanwhile, the cart is aligned at the process chamber with guide frame, which is installed at the base frame of the process chamber. This lid service system may be used for opening/closing a process chamber as well as wet-cleaning the process chamber for semiconductor manufacturing.
Claims8
A process chamber lid service system for semiconductor manufacturing, comprising:
- a process chamber lid service cart having two legs, said legs extending horizontally from said service cart;
- a process chamber lid service frame, said lid service frame holding the process chamber lid on a process chamber;
- a guide frame, said guide frame positioned at a base frame of said process chamber, said guide frame guiding a first leg and a second leg of said service cart;
- and
- guide pin and alignment capture means on each of said service cart and said chamber lid service frame, wherein said means will align said service cart and said chamber lid service frame when said means are operably engaged.
Dependencies are inferred from the claim text.