Heater sealed with carbon wire heating element
AssigneesToshiba Ceramics Co., Ltd., Tokyo Electron Limited
InventorsSunao Seko, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Hideyuki Yokoyama, Masakazu Kobayashi, Takanori Saito, Ken Nakao
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Abstract
A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.
Claims22
A heater sealed with carbon wire heating element therein comprising a heating element composed of carbon wires each being prepared by knitting carbon fibers into a knitted cord or braid and then graphitized, each carbon single fiber having a crystal structure with an interlayer spacing d (002) thereof being 0.343 nm or less and a crystallite size Lc (002) thereof being 4.0 nm or more;
- and a quartz glass member sealed with said heating member therein.
A heater sealed with carbon wire heating element as set forth in claim wherein said heating element composed of carbon wire prepared by knitting carbon single fibers into a knitted cord or braid is subjected to a heat treatment at a temperature of 2000° C. or more in an inert gas atmosphere.
A heater sealed with a carbon wire element comprising a carbon wire heating element sealed within a quartz glass member and produced by a process comprising:
- (a) knitting carbon fibers into a knitted cord or braid,
- (b) graphitizing said cord or braid to produce a wire heating element, and
- (c) sealing said wire heating element within a quartz glass member,
- wherein a longitudinal elongation performance of said heating element is 1.0% or more.
Dependencies are inferred from the claim text.